Deposition of Zeolite Thin Layers Onto Silicon Wafers for Biomedical Use

Author

Fiorillo, Antonino S.

Author_Institution

Dept. of Health Sci., Univ. of Magna Graecia, Catanzaro, Italy

Volume

11

Issue

4

fYear

2012

fDate

7/1/2012 12:00:00 AM

Firstpage

654

Lastpage

656

Abstract

The spin-coating of silicon wafers, (including integrated field-effect transistors) with nanoporous synthetic zeolite is herein described. The aim of this research is to investigate the feasibility of fabricating low noise ionoelectronic microsystems to acquire different biosignals, particularly the action potential generated by neurons. The proposed technique is fully compatible with standard integrated circuit technology. Results of scanning electron microscopy, microanalysis, and absorption process are discussed.

Keywords

bioMEMS; bioelectric potentials; biosensors; field effect transistors; integrated circuit technology; microsensors; nanobiotechnology; nanofabrication; nanoporous materials; nanosensors; neurophysiology; porosity; scanning electron microscopy; spin coating; zeolites; Si; absorption process; action potential generation; biomedical use; biosensors; biosignals; integrated field-effect transistors; low noise ionoelectronic microsystems; microanalysis; nanoporous synthetic zeolite; neurons; scanning electron microscopy; silicon wafers; spin coating; standard integrated circuit technology; zeolite thin layer deposition; Electronic circuits; FETs; Integrated circuits; Moisture; Silicon; Spinning; Substrates; Biosensors; integrated circuits (ICs); nanotechnology;

fLanguage

English

Journal_Title

Nanotechnology, IEEE Transactions on

Publisher

ieee

ISSN

1536-125X

Type

jour

DOI

10.1109/TNANO.2012.2193413

Filename

6183516