• DocumentCode
    1495636
  • Title

    Pulsewidth modulation technique for sampling electrostatic force microscopy

  • Author

    Said, R.A.

  • Author_Institution
    Dept. of Electr. Eng., United Arab Emirates Univ., Al-Ain, United Arab Emirates
  • Volume
    35
  • Issue
    6
  • fYear
    1999
  • fDate
    3/18/1999 12:00:00 AM
  • Firstpage
    450
  • Lastpage
    452
  • Abstract
    A new sampling electrostatic force microscopy technique for noninvasive measurement of microelectronic circuits is presented. The technique utilises a pulsewidth modulated sampling signal at the probe end to enable internal voltage measurement. Unlike previous sampling methods, the presented technique does not require broadband elements
  • Keywords
    electrostatic devices; integrated circuit measurement; integrated circuit testing; pulse width modulation; signal sampling; voltage measurement; internal voltage measurement; microelectronic circuits; noninvasive measurement; probe end; pulsewidth modulation technique; sampling electrostatic force microscopy; sampling signal;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19990329
  • Filename
    756385
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1495636