DocumentCode
1498399
Title
Expressions for nonlinear effects of MEMS switch beam oscillations
Author
Hallbjorner, P. ; Starski, J.P.
Author_Institution
Ericsson Radar Electron. AB, Molndal
Volume
37
Issue
11
fYear
2001
fDate
5/24/2001 12:00:00 AM
Firstpage
693
Lastpage
694
Abstract
MEMS switches with a beam that is free to move during RF signal transmission have nonlinear transfer functions, due to variations in the capacitance between the beam and the underlying transmission line. Expressions for the relative magnitude of modulation and intermodulation products are presented
Keywords
capacitance; intermodulation; micromechanical devices; microwave switches; oscillations; transfer functions; MEMS switch beam oscillations; RF signal transmission; capacitance variation; intermodulation products; modulation; nonlinear effects; nonlinear transfer functions; transmission line;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20010476
Filename
926446
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