DocumentCode
1499897
Title
Semiconducting-oxide chemical sensors
Author
Morrison, S.R.
Author_Institution
Simon Fraser Univ., Burnaby, BC, Canada
Volume
7
Issue
2
fYear
1991
fDate
3/1/1991 12:00:00 AM
Firstpage
32
Lastpage
35
Abstract
The Taguchi and thick-film forms of semiconducting metal-oxide sensors and their reproducibility and stability problems are discussed. An attempt to circumvent these problems by producing a modified thin-film sensor based on oxygen absorption rather than adsorption is described. The sensor is made with evaporated bismuth molybdate, which has a very high diffusion constant for oxygen vacancies. The combustion gas to be sensed extracts lattice oxygen from the bismuth molybdate; atmospheric oxygen restores the lattice oxygen. Because the oxygen vacancies move rapidly in the material, the bulk stoichiometry (i.e. metal/oxygen ratio) follows the surface stoichiometry and controls the resistance. Bismuth molybdate films are stable and, as prepared, are highly sensitive to alcohols. Techniques for improving selectivity are considered. The use of electronic circuitry to circumvent inherent sensor problems is examined.<>
Keywords
bismuth compounds; chemical variables measurement; gas sensors; semiconductor materials; thin film devices; O/sub 2/; Taguchi form; bulk stoichiometry; combustion gas; diffusion constant; oxygen absorption; oxygen vacancies; reproducibility; selectivity; semiconducting metal-oxide sensors; sensor problems; stability problems; surface stoichiometry; thin-film sensor; Bismuth; Chemical sensors; Lattices; Reproducibility of results; Semiconductivity; Semiconductor thin films; Stability; Surface resistance; Thick film sensors; Thin film sensors;
fLanguage
English
Journal_Title
Circuits and Devices Magazine, IEEE
Publisher
ieee
ISSN
8755-3996
Type
jour
DOI
10.1109/101.75926
Filename
75926
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