DocumentCode
1500331
Title
Optical scanners realized by surface-micromachined vertical torsion mirror
Author
Su, Guo-Dung John ; Shi-Sheng Lee ; Wu, M.C.
Author_Institution
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Volume
11
Issue
5
fYear
1999
fDate
5/1/1999 12:00:00 AM
Firstpage
587
Lastpage
589
Abstract
We report on a novel vertical torsion mirror fabricated by surface-micromachining for optical scanner applications. Driven by an electrostatic actuator, the scanning mirror has a resonant frequency of 0.5 kHz and an optical scan range of 26/spl deg/. The maximum achievable number of resolvable spots for this 300 μm×250 μm scanner is 238.
Keywords
micromachining; mirrors; optical fabrication; optical resolving power; optical scanners; electrostatic actuator; maximum achievable number; optical scan range; optical scanner applications; optical scanners; resolvable spots; resonant frequency; scanning mirror; surface-micromachined vertical torsion mirror; surface-micromachining; vertical torsion mirror fabrication; Costs; Electrodes; Electrostatic actuators; Fasteners; Micromachining; Micromechanical devices; Micromirrors; Mirrors; Resonant frequency; Self-assembly;
fLanguage
English
Journal_Title
Photonics Technology Letters, IEEE
Publisher
ieee
ISSN
1041-1135
Type
jour
DOI
10.1109/68.759407
Filename
759407
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