• DocumentCode
    1501944
  • Title

    Calculation of Electron Energy Distribution Functions From Electron Swarm Parameters Using Artificial Neural Network in \\hbox {SF}_{6} and Argon

  • Author

    Tezcan, S.S. ; Akcayol, M. Ali ; Ozerdem, Ozgur Cemal ; Dincer, M.S.

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Gazi Univ., Ankara, Turkey
  • Volume
    38
  • Issue
    9
  • fYear
    2010
  • Firstpage
    2332
  • Lastpage
    2339
  • Abstract
    This paper proposes an artificial neural network (ANN) to obtain the electron energy distribution functions (EEDFs) in SF6 and argon from the following: 1) mean energies; 2) the drift velocities; and 3) other related swarm data. In order to obtain the required swarm data, the electron swarm behavior in SF6 and argon is analyzed over the range of the density-reduced electric field strength E/N from 50 to 800 Td from a Boltzmann equation analysis based on the finite difference method under a steady-state Townsend condition. A comparison between the EEDFs calculated by the Boltzmann equation and by ANN for various values of E/N suggests that the proposed ANN yields good agreement of EEDFs with those of the Boltzmann equation solution results.
  • Keywords
    Boltzmann equation; argon; finite difference methods; neural nets; plasma drift waves; plasma transport processes; sulphur compounds; Ar; Boltzmann equation analysis; SF6; artificial neural network; density-reduced electric field strength; drift velocities; electron energy distribution functions; electron swarm behavior; electron swarm parameters; finite difference method; mean energies; steady-state Townsend condition; swarm data; Argon; Artificial neural networks; Boltzmann equation; Chemical lasers; Distribution functions; Electron mobility; Ionization; Plasma stability; Steady-state; Sulfur hexafluoride; $hbox{SF}_{6}$; Argon; boltzmann equation; neural networks;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2010.2049588
  • Filename
    5471224