Plasmoid formation and multiple steady states in a low pressure, inductively coupled electronegative plasma

Author

Economou, Demeter J. ; Wise, Richard S. ; Kubota, Alison A.

Author_Institution

Dept. of Chem. Eng., Houston Univ., TX, USA

Volume

27

Issue

1

fYear

1999

fDate

2/1/1999 12:00:00 AM

Firstpage

60

Lastpage

61

Abstract

Hysteresis and multiple steady states have been observed in a low pressure inductively coupled plasma in chlorine gas. A bowl-shaped bright structure with sharply delineated edges (plasmoid) was found to form under the planar coil. A different plasma state with rather diffuse emission of lower intensity was also observed under the same operating conditions

Keywords

chlorine; hysteresis; plasma diagnostics; plasma materials processing; plasma sheaths; sputter etching; Cl; Cl plasma; bowl-shaped bright structure; diffuse emission; double layers; hysteresis; low pressure inductively coupled electronegative plasma; low pressure inductively coupled plasma; multiple steady states; operating conditions; planar coil; plasma state; plasmoid; plasmoid formation; sharply delineated edges; Argon; Chemical engineering; Coils; Electrodes; Hysteresis; Inductors; Plasma applications; Plasma chemistry; Plasma density; Plasma materials processing;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.763035

Filename

763035