Plasma sheath electric field strengths above a grooved electrode in a parallel-plate radio-frequency discharge

Author

Czarnetzki, U. ; Hebner, G.A. ; Luggenhölscher, D. ; Döbele, H.F. ; Riley, M.E.

Author_Institution

Inst. fur Laser- und Plasmaphys., Essen Univ., Germany

Volume

27

Issue

1

fYear

1999

fDate

2/1/1999 12:00:00 AM

Firstpage

70

Lastpage

71

Abstract

The magnitude of the sheath electric field above a grooved electrode was measured using a novel, two color, laser induced fluorescence technique. Spatially resolved electric fields in the sheath region were determined by mapping the field induced Stark splitting of the n=14 level in atomic hydrogen. Measured electric field values are in good agreement with calculated values

Keywords

Stark effect; electric field measurement; electrodes; fluorescence; high-frequency discharges; hydrogen; photoluminescence; plasma diagnostics; plasma properties; plasma sheaths; H; electric field strengths; electric field values; field induced Stark splitting; grooved electrode; parallel-plate radio-frequency discharge; plasma sheath electric field strengths; plasma sheaths; sheath electric field; sheath region; spatially resolved electric fields; two color laser induced fluorescence technique; Electric variables measurement; Electrodes; Hydrogen; Laser excitation; Laser transitions; Laser tuning; Plasma measurements; Plasma sheaths; Radio frequency; Voltage;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.763042

Filename

763042