DocumentCode
1505681
Title
Heating modes in capacitively coupled RF plasmas observed with emission spectroscopy
Author
Mahony, C.M.O. ; Graham, W.G.
Author_Institution
Dept. of Pure & Appl. Phys., Queen´´s Univ., Belfast, UK
Volume
27
Issue
1
fYear
1999
fDate
2/1/1999 12:00:00 AM
Firstpage
72
Lastpage
73
Abstract
It is demonstrated that spatio-temporally resolved emission studies of a capacitively coupled gaseous electronics conference reference cell discharge can be used to determine changes in the heating mechanisms in such discharges
Keywords
high-frequency discharges; plasma diagnostics; plasma radiofrequency heating; capacitively coupled RF plasmas; capacitively coupled gaseous electronics conference reference cell discharge; emission spectroscopy; heating mechanisms; heating modes; spatio-temporally resolved emission; Argon; Electrodes; Energy resolution; Heating; Image resolution; Plasma measurements; Radio frequency; Spatial resolution; Spectroscopy; Voltage;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/27.763043
Filename
763043
Link To Document