• DocumentCode
    1508823
  • Title

    Capacitively Coupled Plasma With an Asymmetric Dielectric Plate

  • Author

    Kenney, Jason A. ; Rauf, Shahid ; Collins, Ken

  • Author_Institution
    Appl. Mater., Inc., Sunnyvale, CA, USA
  • Volume
    39
  • Issue
    11
  • fYear
    2011
  • Firstpage
    2524
  • Lastpage
    2525
  • Abstract
    A 3-D plasma model is used to investigate the impact of an azimuthally asymmetric quartz plate on a capacitively coupled discharge in an otherwise symmetric chamber. Large azimuthal nonuniformity in electron density arises due to electrical asymmetry. In addition, ion angular distributions show a linkage between azimuthal and radial angles in regions away from the symmetry plane.
  • Keywords
    electron density; plasma density; plasma simulation; surface discharges; 3D plasma model; SiO2; asymmetric dielectric plate; azimuthal angle; azimuthal nonuniformity; azimuthally asymmetric quartz plate; capacitively coupled discharge; capacitively coupled plasma; electrical asymmetry; electron density; ion angular distributions; radial angle; symmetric chamber; symmetry plane; Dielectrics; Electrodes; Inductors; Mathematical model; Plasmas; Radio frequency; Solid modeling; 3-D plasma simulation; Capacitively coupled;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2011.2132148
  • Filename
    5762367
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1508823