DocumentCode
1512869
Title
Defocus Polar rOse Estimation Method (POEM): A Fast Defocus Estimation Method for STEM
Author
Tejada, Arturo ; den Dekker, Arnold J.
Author_Institution
Delft Center for Syst. & Control, Delft Univ. of Technol. (DUT), Delft, Netherlands
Volume
61
Issue
10
fYear
2012
Firstpage
2723
Lastpage
2730
Abstract
The defocus Polar rOse Estimation Method (POEM) has been introduced recently as an alternative method for defocus estimation in scanning transmission electron microscopy. Its principle of operation is expanded here to include more realistic image models. The details of the expansion are discussed in depth along with the results of new simulation-based performance tests that take into account the effect of measurement noise. The results clearly show that the defocus POEM has the potential to be fast and accurate.
Keywords
measurement errors; scanning-transmission electron microscopy; POEM; STEM; defocus estimation method; measurement noise; polar rose estimation method; realistic image model; transmission electron microscopy; Adaptive optics; Correlation; Detectors; Estimation; Lenses; Microscopy; Optical imaging; Automatic control; focusing; parameter estimation; time series analysis; transmission electron microscopy;
fLanguage
English
Journal_Title
Instrumentation and Measurement, IEEE Transactions on
Publisher
ieee
ISSN
0018-9456
Type
jour
DOI
10.1109/TIM.2012.2193650
Filename
6197234
Link To Document