Embedded Capacitive Displacement Sensor for Nanopositioning Applications

Author

Avramov-Zamurovic, Svetlana ; Dagalakis, Nicholas G. ; Lee, Rae Duk ; Yoo, Jae Myung ; Kim, Yong Sik ; Yang, Seung Ho

Author_Institution

United States Naval Acad., Annapolis, MD, USA

Volume

60

Issue

7

fYear

2011

fDate

7/1/2011 12:00:00 AM

Firstpage

2730

Lastpage

2737

Abstract

The scale of nano-sized objects requires very precise position determination. The state-of-the-art manipulators involve accurate nanometer positioning. This paper presents the design, fabrication process, and testing of a capacitance-based displacement sensor. The nanopositioner application required active sensing area dimensions to be hundreds of micrometers, making it necessary to develop sensor electrodes that are a few micrometers in size. The advantages of the sensor presented are its noninvasive method and very low voltage necessary for signal conditioning. Initial results suggest good linearity and sensitivity of 0.001 pF/μm, permitting a reliable displacement resolution on the order of 100 nm.

Keywords

capacitive sensors; micrometry; nanofabrication; nanopositioning; nanosensors; embedded capacitive displacement sensor; fabrication process; micrometers; nanopositioning applications; noninvasive method; sensor electrodes; signal conditioning; size 100 nm; Capacitance; Capacitance measurement; Electrodes; NIST; Nanopositioning; Needles; Sensitivity; Capacitance measurement; displacement measurement; fabrication; nano-size positioners; nanotechnology; sensitivity;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/TIM.2011.2126150

Filename

5765684