• DocumentCode
    1514792
  • Title

    Photonic Crystal Fiber Tip Sensor for High-Temperature Measurement

  • Author

    Park, Bryan ; Provine, J. ; Jung, Il Woong ; Howe, Roger T. ; Solgaard, XOlav

  • Author_Institution
    Dept. of Electr. Eng., Stanford Univ., Stanford, CA, USA
  • Volume
    11
  • Issue
    11
  • fYear
    2011
  • Firstpage
    2643
  • Lastpage
    2648
  • Abstract
    We demonstrate a temperature sensor consisting of a 2-D, Silicon (Si), Photonic Crystal (PC) attached to the facet of a standard single-mode optical fiber. The 2-D PC sensors are fabricated on standard Si wafers, using a single mask and a combination of isotropic and anisotropic etching, and microassembled onto the facets of the optical fibers by Si-welding. The temperature of the Si-PC sensor is monitored by measuring its reflectance spectrum in the 1250 to 1650 nm wavelength range. The measured reflectivity peak shift is 0.11 nm°C in the 100°C to 700°C temperature range. The observed spectral shift and temperature sensitivity are significantly higher than high-temperature fiber Bragg grating sensors, and comparable to long-period fiber gratings sensors. The high sensitivity, combined with compactness and robust structure, give these sensors strong potential for use in harsh environments.
  • Keywords
    elemental semiconductors; etching; fibre optic sensors; holey fibres; microassembling; photonic crystals; silicon; temperature measurement; temperature sensors; Si; anisotropic etching; high-temperature fiber Bragg grating sensor; high-temperature measurement; isotropic etching; long-period fiber gratings sensor; microassembling; observed spectral shift; photonic crystal fiber tip sensor; reflectance spectrum measurement; reflectivity peak shift measurement; standard single-mode optical facet fiber; temperature 100 degC to 700 degC; temperature sensitivity; temperature sensor; wavelength 1250 nm to 1650 nm; Optical fiber sensors; Optical fibers; Refractive index; Sensitivity; Silicon; Temperature measurement; Temperature sensors; Fiber tip sensor; GOPHER process; high-temperature measurement; photonic crystal;
  • fLanguage
    English
  • Journal_Title
    Sensors Journal, IEEE
  • Publisher
    ieee
  • ISSN
    1530-437X
  • Type

    jour

  • DOI
    10.1109/JSEN.2011.2153844
  • Filename
    5766010