DocumentCode
1528631
Title
Particle composition of high-pressure SF6 plasma with electron temperature greater than gas temperature
Author
Tanaka, Yasunori ; Yokomizu, Yasunobu ; Ishikawa, Motohiro ; Matsumura, Toshiro
Author_Institution
Dept. of Electr. Eng., Nagoya Univ., Japan
Volume
25
Issue
5
fYear
1997
fDate
10/1/1997 12:00:00 AM
Firstpage
991
Lastpage
995
Abstract
Numerical computation was performed to derive particle compositions of high-pressure SF6 plasmas in which the electron temperature Te is greater than the gas temperature T g. The effective excitation temperature Tex for each of particles was proposed to express the distribution of particles in excited states. Furthermore, the relation equations for chemical equilibrium in a two-temperature plasma were developed on the basis of the second law of thermodynamics. At fixed Tg in the range of 6000-9000 K, the increasing Te from 9000-20 000 K encourages the dissociation and ionization of particles, causing the composition of SF6 plasma at 0.1 MPa to differ markedly from the composition under the condition of thermal equilibrium
Keywords
arcs (electric); chemical equilibrium; dissociation; excited states; ionisation; plasma collision processes; plasma density; plasma temperature; plasma thermodynamics; sulphur compounds; 0.1 MPa; 6000 to 9000 K; 9000 to 20000 K; SF6; SF6 plasma; chemical equilibrium; dissociation; effective excitation temperature; electron temperature; gas temperature; high-pressure plasma; ionization; particle compositions; particle distribution; relation equations; second law of thermodynamics; thermal equilibrium conditions; two-temperature plasma; Chemicals; Electrons; Energy states; Equations; Plasma chemistry; Plasma temperature; Sulfur hexafluoride; Tellurium; Temperature distribution; Thermodynamics;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/27.649615
Filename
649615
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