Transmission through optically generated inductive grid arrays

Author

Lockyer, D.S. ; Vardaxoglou, J.C. ; Kearney, M.J.

Author_Institution

Dept. of Electron. & Electr. Eng., Loughborough Univ. of Technol., UK

Volume

47

Issue

7

fYear

1999

fDate

7/1/1999 12:00:00 AM

Firstpage

1391

Lastpage

1397

Abstract

A technique is developed for generating pseudometallic plasma inductive grid arrays within a semiconductor wafer. The induced plasma elements are defined by a surface impedance which is discussed. Results of an investigation into the transmission properties of a variety of array designs between 16 and 40 GHz are presented. Measurements are performed on a silicon wafer illuminated by an external optical source via a negative image mask

Keywords

aperture antennas; dipole antenna arrays; frequency selective surfaces; microwave antenna arrays; microwave photonics; optical control; periodic structures; array designs; external optical source; induced plasma elements; negative image mask; optically generated inductive grid arrays; pseudometallic plasma inductive grid arrays; surface impedance; transmission properties; Arrayed waveguide gratings; Dielectric substrates; Mesh generation; Microwave antenna arrays; Optical arrays; Optical waveguides; Plasma properties; Plasma sources; Silicon; Surface impedance;

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/22.775484

Filename

775484