DocumentCode
1531921
Title
Electromigration in Al thin films induced by surface acoustic waves: application to imaging
Author
Tucoulou, Rémi ; Brunel, Michel ; Roshchupkin, Dmitry V. ; Schelokov, Igor A. ; Colin, ôJérome ; Grilhé, Jean
Author_Institution
ESRF, Grenoble, France
Volume
46
Issue
4
fYear
1999
fDate
7/1/1999 12:00:00 AM
Firstpage
856
Lastpage
860
Abstract
The propagation of a high amplitude surface acoustic wave in an Al thin film induces a large-scale electromigration phenomenon resulting in a permanent etching of the acoustic field in the film. The etched patterns depend on the time of propagation and on the acoustic characteristics. Preliminary observations of a few grooved structures in Al films have been performed by different techniques. A first explanation of this phenomenon based on dynamical Grinfeld instabilities is proposed. By providing permanent pictures of acoustic fields emitted by transducers, this effect could be used to perform imaging of surface acoustic wave propagation.
Keywords
aluminium; electromigration; etching; metallic thin films; surface acoustic waves; surface diffusion; ultrasonic imaging; ultrasonic propagation; Al; Al thin film; Al thin films; acoustic field; dynamical Grinfeld instabilities; electromigration; etched patterns; grooved structures; high amplitude surface acoustic wave; imaging; large-scale electromigration phenomenon; permanent etching; surface acoustic wave propagation; surface acoustic waves; Acoustic emission; Acoustic imaging; Acoustic propagation; Acoustic transducers; Acoustic waves; Electromigration; Etching; Large-scale systems; Surface acoustic waves; Transistors;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/58.775650
Filename
775650
Link To Document