• DocumentCode
    1531921
  • Title

    Electromigration in Al thin films induced by surface acoustic waves: application to imaging

  • Author

    Tucoulou, Rémi ; Brunel, Michel ; Roshchupkin, Dmitry V. ; Schelokov, Igor A. ; Colin, ôJérome ; Grilhé, Jean

  • Author_Institution
    ESRF, Grenoble, France
  • Volume
    46
  • Issue
    4
  • fYear
    1999
  • fDate
    7/1/1999 12:00:00 AM
  • Firstpage
    856
  • Lastpage
    860
  • Abstract
    The propagation of a high amplitude surface acoustic wave in an Al thin film induces a large-scale electromigration phenomenon resulting in a permanent etching of the acoustic field in the film. The etched patterns depend on the time of propagation and on the acoustic characteristics. Preliminary observations of a few grooved structures in Al films have been performed by different techniques. A first explanation of this phenomenon based on dynamical Grinfeld instabilities is proposed. By providing permanent pictures of acoustic fields emitted by transducers, this effect could be used to perform imaging of surface acoustic wave propagation.
  • Keywords
    aluminium; electromigration; etching; metallic thin films; surface acoustic waves; surface diffusion; ultrasonic imaging; ultrasonic propagation; Al; Al thin film; Al thin films; acoustic field; dynamical Grinfeld instabilities; electromigration; etched patterns; grooved structures; high amplitude surface acoustic wave; imaging; large-scale electromigration phenomenon; permanent etching; surface acoustic wave propagation; surface acoustic waves; Acoustic emission; Acoustic imaging; Acoustic propagation; Acoustic transducers; Acoustic waves; Electromigration; Etching; Large-scale systems; Surface acoustic waves; Transistors;
  • fLanguage
    English
  • Journal_Title
    Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0885-3010
  • Type

    jour

  • DOI
    10.1109/58.775650
  • Filename
    775650