A rod-shaped vibro touch sensor using PZT thin film

Author

Kanda, Takefumi ; Morita, Takeshi ; Kurosawa, Minoru Kuribayashi ; Higuchi, Toshiro

Author_Institution

Dept. of Precision Machinery Eng., Tokyo Univ., Japan

Volume

46

Issue

4

fYear

1999

fDate

7/1/1999 12:00:00 AM

Firstpage

875

Lastpage

882

Abstract

We have fabricated a probe sensor. This sensor is for high precision coordinate measuring machines, surface roughness measuring tools, or scanning probe microscopes (SPM). This sensor consists of a rod vibrating in the axial direction. The longitudinal vibration was excited and also detected by PZT thin film. The PZT thin film was fabricated by a hydrothermal method. The hydrothermal method uses the reaction process in hot and high pressure aqueous solutions. We made a 27.8-mm long sensor. Its resonance frequency was 116 kHz. The sensitivity and resolution were evaluated by experiments. We succeeded in oscillating the rod and detecting the contact.

Keywords

lead compounds; piezoelectric thin films; probes; scanning probe microscopy; surface topography measurement; tactile sensors; 116 kHz; PZT; PbZrO3TiO3; coordinate measuring machines; high pressure aqueous solutions; hydrothermal method; longitudinal vibration; probe sensor; resolution; rod-shaped vibro touch sensor; scanning probe microscopes; sensitivity; surface roughness measuring tools; Coordinate measuring machines; Damping; Oscillators; Resonance; Resonant frequency; Scanning probe microscopy; Tactile sensors; Thin film sensors; Vibrations; Viscosity;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/58.775653

Filename

775653