Microfabricated Lamb wave device based on PZT sol-gel thin film for mechanical transport of solid particles and liquids

Author

Luginbuhl, Philippe ; Collins, Scott D. ; Racine, Georges-André ; Grétillat, Marc-Alexis ; De Rooij, Nicolaas F. ; Brooks, Keith G. ; Setter, Nava

Author_Institution

Inst. of Microtechnol., Neuchatel Univ., Switzerland

Volume

6

Issue

4

fYear

1997

fDate

12/1/1997 12:00:00 AM

Firstpage

337

Lastpage

346

Abstract

The fabrication using silicon micromachining and characterization of an acoustic Lamb wave actuator is presented. The intended use of the device is for mass transport and sensor applications. The device consists of dual interdigitated transducers patterned on a thin-film composite membrane of silicon nitride, platinum, and a sol-gel-derived piezoelectric ceramic (PZT) thin film. The acoustic properties of the device are presented along with preliminary applications to mechanical transport and liquid delivery systems. Improved acoustic signals and improved mass transport are achieved with PZT over present Lamb wave devices utilizing ZnO or AlN as the piezoelectric transducer

Keywords

interdigital transducers; lead compounds; micromachining; piezoceramics; piezoelectric thin films; piezoelectric transducers; sol-gel processing; surface acoustic wave transducers; PZT sol-gel thin film; Si3N4-Pt-PbZrO3TiO3; Si₃N₄-Pt-PZT; acoustic Lamb wave actuator; chemical sensor; composite membrane; interdigitated transducer; liquid delivery; mass transport; mechanical transport; microfabrication; piezoelectric ceramic; silicon micromachining; solid particles; Acoustic devices; Acoustic waves; Actuators; Fabrication; Micromachining; Piezoelectric films; Piezoelectric transducers; Semiconductor thin films; Silicon; Thin film devices;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.650131

Filename

650131