Experimental analysis and modeling of buried waveguides fabricated by quantum-well intermixing

Author

Haysom, Joan E. ; Delâge, Andre ; He, Jian-Jun ; Koteles, Emil S. ; Poole, Philip J. ; Feng, Yan ; Goldberg, Richard D. ; Mitchell, Ian V. ; Charbonneau, Sylvain

Author_Institution

Inst. for Microstructural Sci., Nat. Res. Council of Canada, Ottawa, Ont., Canada

Volume

35

Issue

9

fYear

1999

fDate

9/1/1999 12:00:00 AM

Firstpage

1354

Lastpage

1363

Abstract

The fabrication of buried waveguides in InP-based quantum-well (QW) material through the use of implantation. Enhanced QW band edge blue-shifting is reported. First, the lateral selectivity of implantation-induced QW intermixing is investigated using a specially designed implantation mask and photoluminescence. The refractive index change of the intermixed material is measured near the band edge. In combination, the lateral resolution and the index difference have allowed for the fabrication of narrow buried waveguides in an InP-based laser structure. Detailed modeling of the mode excitation and beam propagation of these devices is performed, and results are compared with experimental near-field profiles. We demonstrate that the waveguides are single-mode for both TE and TM polarizations at wavelengths near the band edge. The potential applications of this waveguide structure include post-growth fabrication of buried waveguide lasers and other integrated components

Keywords

III-V semiconductors; indium compounds; optical fabrication; optical waveguide theory; optical waveguides; semiconductor quantum wells; spectral line shift; InP-based QW; QW band edge blue-shifting; buried optical waveguide fabrication; implantation-induced QW intermixing; integrated components; lateral resolution; lateral selectivity; mode excitation; near-field profiles; post-growth fabrication; quantum-well intermixing; refractive index change; Laser beams; Laser excitation; Laser modes; Optical device fabrication; Optical materials; Photoluminescence; Quantum wells; Refractive index; Waveguide components; Waveguide lasers;

fLanguage

English

Journal_Title

Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

0018-9197

Type

jour

DOI

10.1109/3.784598

Filename

784598