DocumentCode
1552926
Title
Microelectromechanical capacitor with wide tuning range
Author
Nieminen, H. ; Ermolov, V. ; Ryhnen, T.
Author_Institution
Nokia Res. Center, Helsinki, Finland
Volume
37
Issue
24
fYear
2001
fDate
11/22/2001 12:00:00 AM
Firstpage
1451
Lastpage
1452
Abstract
A new anchoring design is proposed for a microelectromechanical (MEM) capacitor that allows realisation of wide tuning range devices. The MEM capacitor is made of gold using surface micromachining. The capacitor has a capacitance of 1.58 pF and achieves a tuning range of 2.25:1 with parasitics
Keywords
Q-factor; capacitors; gold; micromechanical devices; tuning; 1.58 pF; Au; MEMS capacitor; anchoring design; gold; high quality factor; high-Q factor; low series resistance; microelectromechanical capacitor; surface micromachining; variable capacitors; voltage controlled capacitor; wide tuning range devices;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20011005
Filename
970387
Link To Document