Characteristic impedance extraction using calibration comparison

Author

Vandenberghe, Servaas ; Schreurs, Dominique M M P ; Carchon, Geert ; Nauwelaers, Bart K J C ; De Raedt, Walter

Author_Institution

Dept. of Electronics, Systems, Automation, & Technol., Katholieke Univ., Leuven, Belgium

Volume

49

Issue

12

fYear

2001

fDate

12/1/2001 12:00:00 AM

Firstpage

2573

Lastpage

2579

Abstract

A robust line impedance identification method is presented in this paper. It determines the characteristic impedance of on-wafer thru-line-reflect (TLR) standards measured after an initial off-wafer line-reflect-match or TLR calibration. The only assumption made is that the obtained trans-wafer error boxes are a cascade of a symmetric probe-related disturbance and a change in reference impedance. The proposed method yields an unbiased estimate of the complex characteristic impedance. Results from coplanar lines on a medium resistivity silicon substrate support the made assumption

Keywords

calibration; coplanar transmission lines; electric impedance measurement; measurement errors; microwave measurement; Si; characteristic impedance; coplanar line; line impedance identification; medium resistivity silicon substrate; off-wafer TLR calibration; off-wafer line-reflect-match calibration; on-wafer thru-line-reflect measurement; parameter extraction; reference impedance; trans-wafer error box; Calibration; Conductivity; Electronics packaging; Impedance measurement; Measurement standards; Robustness; Silicon; Voltage; Waveguide junctions; Yield estimation;

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/22.971652

Filename

971652