Space- and surface-charge behavior analysis of plasma-preprocessed dielectric thin films

In order to study the space-charge behavior in dielectric thin films, a space-charge distribution measuring system based on a laser-induced pressure pulse (LIPP) method was constructed. The pressure pulse was generated by irradiating the absorbent on a sample surface with a mode-locked picosecond YAG laser to achieve good spatial resolution. From a LIPP response of a polyvinylidene fluoride piezoelectric thin film, an in-depth profile of the system is estimated. For example, it was estimated to be about 2 μm for polytetrafluoroethylene (PTFE) thin film. By using the space-charge density distribution measurement, space- and surface-charge behavior of the corona-charged PTFE thin film was studied. The effect of the antistatic process using low-pressure discharge plasma and a charge-elimination process by dipping in city water was also studied. Plasma processing enhances the effect of charge elimination by dipping in city water