Effectively Reducing the CoO & Minimized PFC Emission by Successful Evaluating CVD Alternative Cleaning Gas, Zyron® c-C4F8

In this paper, we illustrate the successful replacement of C₃F₈ with Zyron^reg c-C₄F₈according to its high utilization efficiency in the PECVD chamber-cleaning process, which results in substantially reduced manufacturing costs, cleaning time and perfluorocarbon (PFC) emissions, by an effective and complete evaluation method with DOE matrix in Novellus Concept-2 tools. During the qualifying, we also proved the results are consistent with the IPCC 2006 official announcement of gases properties and concurrently mitigated the abasement system loading of the PFC emissions treatment.