Development of pressure transducers utilizing deep X-ray lithography

Mechanical analysis and design of an improved class of differential pressure transducers is presented. Double-sided overload protection for a planar transducer is achieved with three-dimensional stops, produced with a process involving X-ray lithography and precision electroplating. Such metallic stops limit motion, suppress diaphragm stress, and facilitate the option of a second signal to verify performance. Computations indicate that the proposed device can generally sustain pressures substantially greater than those producing initial contact between the diaphragm and the metallic stops.<>