Performance analysis and measurement of micro-machined gyroscope

The micro-machined gyroscope, with advantages of small size, lower weight, high reliability, lower power consumption and lower cost, has an observably increasing usage in many fields. At present, the development of comb capacitive micro-machined gyroscope is very fast due to its high reliability. The resent gyroscopes are in rate grade and can not satisfy the demands on tactical grade and navigation grade. Therefore, how to improve the performance of gyroscope has become a main target pursued by designers. The comb capacitive micro-machined gyroscope basing on the Coriolis´s effect is a kind of vibration gyroscope. The vibration properties are important parameters for the micro-machined gyroscope. The working performance of micro gyroscope can be clearly understood and its other performances can be known only when its vibration properties were obtained. We tested the vibration properties of comb capacitive micro-machined gyroscope in normal atmosphere. Some instruments used in testing experiment are turntable, direct current power source, dynamic signal analyzer, data acquisition circuit and data storage system etc. From the testing results, we obtained the driving resonant frequency and the detection resonant frequency of micro gyroscope. The quality factors in two directions are also obtained.