DocumentCode
1569498
Title
Toward the potential of electrowetting microprisms: High performance liquids, low voltage dielectrics, and 3D lithography
Author
Zhang, Jilin ; Hou, Linlin ; Smith, Neil R. ; Christy, Larry ; Heikenfeld, Jason C.
Author_Institution
Novel Devices Lab., Univ. of Cincinnati, Cincinnati, OH
fYear
2008
Firstpage
261
Lastpage
262
Abstract
Electrowetting microprisms are projected to provide high performance for beam steering. To achieve this goal, high performance liquids, low voltage dielectrics, and 3D lithography are now in development. In this paper, we will review the operational basics of electrowetting microprisms, and the above-mentioned three key factors.
Keywords
dielectric materials; lithography; micro-optics; oils; optical prisms; wetting; 3D lithography; beam steering; electrowetting micrprisms; high performance liquids; low voltage dielectrics; Beam steering; Contacts; Dielectric liquids; Equations; Lithography; Low voltage; Petroleum; Scanning electron microscopy; Surface tension; Viscosity;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE Lasers and Electro-Optics Society, 2008. LEOS 2008. 21st Annual Meeting of the
Conference_Location
Acapulco
Print_ISBN
978-1-4244-1931-9
Electronic_ISBN
978-1-4244-1932-6
Type
conf
DOI
10.1109/LEOS.2008.4688589
Filename
4688589
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