Parameterized layout synthesis, extraction, and SPICE simulation for MEMS

Author

Lo, Nanping R. ; Berg, Erik C. ; Quakkelaar, Scott R. ; Simon, Jonathan N. ; Tachiki, Mark ; Lee, Hee-Jung ; Pister, Kristofer S J

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

Volume

4

fYear

1996

Firstpage

481

Abstract

A suite of software tools which implements parameterized layout synthesis and SPICE simulation for surface-micromachined micro-electrical-mechanical systems (MEMS) is presented. These tools and techniques are demonstrated by using the design of a MEMS linear resonator as an example, and the various stages of this design are examined, including the generation of the circuit layout from performance specifications, the simulation of the devices, and the testing of actual fabricated resonators

Keywords

SPICE; circuit analysis computing; circuit layout CAD; digital simulation; micromechanical resonators; CAD tools; MEMS; SPICE simulation; circuit layout; linear resonator; micro-electrical-mechanical systems; parameterized layout synthesis; performance specifications; software tools; system-level design; Circuit simulation; Circuit testing; Design automation; Electrostatics; Micromechanical devices; Process design; SPICE; Software tools; Space exploration; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 1996. ISCAS '96., Connecting the World., 1996 IEEE International Symposium on

Conference_Location

Atlanta, GA

Print_ISBN

0-7803-3073-0

Type

conf

DOI

10.1109/ISCAS.1996.542005

Filename

542005