Improved surface acoustic wave filter design with low insertion loss

Author

Zhang, Bowei ; Zaghloul, Mona E.

Author_Institution

Inst. for MEMS&VLSI Technol., George Washington Univ., Washington, DC, USA

fYear

2010

Firstpage

241

Lastpage

243

Abstract

SAW filters are often used in wireless communications and provide significant advantages in performance, cost, and size over other filter technologies. As a passive device, how to minimize loss is a very important issue for SAW filter design. This paper proposes a new MEMS SAW filter design to minimize insertion loss in the SAW device. By finite element modeling and simulation, this new design has approved to decrease the insertion loss by more than 10 dB, and increase the Q factor by more than 30%. The major novelties of the structure include new IDT finger structure, piezoelectric material edge etching, and metal shell reflectors.

Keywords

finite element analysis; surface acoustic wave filters; MEMS SAW filter design; SAW device; finite element modeling; low insertion loss; metal shell reflector; passive device; piezoelectric material edge etching; simulation; surface acoustic wave filter design; wireless communication; Acoustic waves; Costs; Finite element methods; Insertion loss; Micromechanical devices; Q factor; SAW filters; Surface acoustic wave devices; Surface acoustic waves; Wireless communication; High Q; Low insertion loss; MEMS; finite element modeling; surface acoustic wave (SAW);

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems (MWSCAS), 2010 53rd IEEE International Midwest Symposium on

Conference_Location

Seattle, WA

ISSN

1548-3746

Print_ISBN

978-1-4244-7771-5

Type

conf

DOI

10.1109/MWSCAS.2010.5548662

Filename

5548662