High rate, low temperature (90/spl deg/C) deposition of Ni-Zn ferrite films highly permeable in GHz range

Summary form only given. We successfully prepared Ni-Zn ferrite films with large resistivity and thus high permeability at high frequencies (up to 1 GHz) at 90/spl deg/C by spin spray ferrite plating from aqueous solutions. Although the deposition rate of the ferrite plating method was 17 nm/min and 4 or 5 times higher than the sputtering method, a further increase in the deposition rate is required for industrial applications. In this study NH/sub 3/ was added into the aqueous solution to attain higher deposition rates for Ni-Zn ferrite films, and their complex permeability was measured at frequencies up to 3 GHz.