Electronic temperature compensation of clamped-clamped beam MEMS resonators

Author

Zadeh, Gorji S A ; Saha, T. ; Allidina, K. ; Nabki, F. ; El-Gamal, M.N.

Author_Institution

McGill Univ., Montreal, QC, Canada

fYear

2010

Firstpage

1193

Lastpage

1196

Abstract

An electronic system for temperature compensation of MEMS resonators is proposed. The system is based on a dual resonator compensation technique using thermal feedback. It allows for the implementation of a fully integrated solution, while minimizing the complexity of the compensation circuitry. Design methodologies are introduced along with analysis equations. The circuitry is implemented in 0.18 μm CMOS technology. The system exhibits a simulated temperature stability of ±0.74 ppm over a -45 °C to 85 °C temperature range, and has a power consumption of 181 mW.

Keywords

CMOS integrated circuits; compensation; micromechanical resonators; CMOS technology; clamped-clamped beam MEMS resonators; dual-resonator compensation technique; electronic temperature compensation; power 181 mW; size 0.18 mum; temperature -45 degC to 85 degC; thermal feedback; CMOS technology; Circuit simulation; Circuit stability; Design methodology; Energy consumption; Equations; Feedback; Integrated circuit technology; Micromechanical devices; Temperature distribution;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems (MWSCAS), 2010 53rd IEEE International Midwest Symposium on

Conference_Location

Seattle, WA

ISSN

1548-3746

Print_ISBN

978-1-4244-7771-5

Type

conf

DOI

10.1109/MWSCAS.2010.5548878

Filename

5548878