Field modulation micro coils for magneto-optical recording

Author

Sugawara, E. ; Wako, N. ; Satoh, Masatoshi ; Suzuki, Hajime ; Shirakawa, Kazuhiro ; Masumoto, T.

Author_Institution

Res. & Dev. Unit, Tokin Corp., Sendai, Japan

fYear

2002

Abstract

Summary form only given. A magnetic field modulation (MFM) coil with a magnetic core is described for advanced magneto-optical recording technologies of 50-100 Gb/in/sup 2/. This MFM coil is fabricated on a Si substrate by thin film process technologies for Si etching and the magnetic multilayered core. Three holes are chemically etched in the Si substrate as contact holes and laser light hole. The magnetic core, consisting of a CoFeSiB/SiO/sub 2/ composite multi-layered film, is applicable to MFM coils.

Keywords

coils; etching; magnetic cores; magnetic multilayers; magneto-optical modulation; magneto-optical recording; CoFeSiB-SiO/sub 2/; CoFeSiB/SiO/sub 2/ composite multi-layered magnetic core; MFM coil; Si; Si etching; Si substrate; chemically etched contact holes; chemically etched laser light hole; field modulation micro coils; magnetic core; magnetic field modulation coil; magneto-optical recording; magneto-optical recording technology; thin film technologies; Chemical lasers; Chemical technology; Coils; Etching; Magnetic cores; Magnetic films; Magnetic force microscopy; Magnetic modulators; Magnetooptic recording; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 2002. INTERMAG Europe 2002. Digest of Technical Papers. 2002 IEEE International

Conference_Location

Amsterdam, The Netherlands

Print_ISBN

0-7803-7365-0

Type

conf

DOI

10.1109/INTMAG.2002.1001453

Filename

1001453