• DocumentCode
    1577227
  • Title

    Error correction technique for dynamic impedance measurement

  • Author

    Quaresma, Henrique ; Silva, António Pedro ; Serra, António Cruz

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Tech. Univ. of Lisbon, Lisboa, Portugal
  • Volume
    2
  • fYear
    2003
  • Firstpage
    1009
  • Abstract
    In this paper a numerical model of a general purpose instrument to measure the electrical properties of semiconductor devices is presented. Numerical simulation results are compared with experimental data and it is shown that the model can accurately describe the equipment behavior. As a consequence it can be used to correct systematic errors increasing the accuracy of the instrument results.
  • Keywords
    electric impedance measurement; measurement systems; numerical analysis; dynamic impedance measurement; error correction technique; semiconductor devices; Calibration; Current measurement; Digital signal processing; Error correction; Gain measurement; Impedance measurement; Instruments; Numerical models; Testing; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Instrumentation and Measurement Technology Conference, 2003. IMTC '03. Proceedings of the 20th IEEE
  • ISSN
    1091-5281
  • Print_ISBN
    0-7803-7705-2
  • Type

    conf

  • DOI
    10.1109/IMTC.2003.1207904
  • Filename
    1207904