DocumentCode
1588566
Title
Micro-diaphragm performance analysis for polyimide diaphragm
Author
Hasikin, K. ; Soin, N. ; Ibrahim, F.
Author_Institution
Dept. of Biomed. Eng., Univ. of Malaya, Kuala Lumpur, Malaysia
fYear
2010
Firstpage
293
Lastpage
296
Abstract
This paper presents a micro-diaphragm performance analysis for optical sensor for human pulse pressure detection. The effect of diaphragm radius and diaphragm thickness on the static and frequency responses were investigated. It can be concluded that the polyimide micro-diaphragm with a radius of 90μm and thickness of 4μm has achieved the optimum performance in term of the sensitivity, flexural rigidity and resonance frequency.
Keywords
diaphragms; optical sensors; pressure sensors; flexural rigidity; human pulse pressure detection; microdiaphragm performance analysis; optical sensor; polyimide diaphragm; resonance frequency; size 4 mum; size 90 mum; Biomedical engineering; Biosensors; Humans; Optical design; Optical sensors; Performance analysis; Polyimides; Pressure measurement; Resonance; Resonant frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Electronics (ICSE), 2010 IEEE International Conference on
Conference_Location
Melaka
Print_ISBN
978-1-4244-6608-5
Type
conf
DOI
10.1109/SMELEC.2010.5549367
Filename
5549367
Link To Document