DocumentCode
159424
Title
Proposal of MEMS optical device using slot-ring resonator with low-voltage operation
Author
Amemiya, Yoshiteru ; Sana, Amrita Kumar ; Okada, Kenichi ; Honzawa, Keita ; Fukuyama, Masataka ; Yokoyama, Shiyoshi
Author_Institution
Res. Inst. for Nanodevice & Bio Syst., Hiroshima Univ., Higashi-Hiroshima, Japan
fYear
2014
fDate
27-29 Aug. 2014
Firstpage
69
Lastpage
70
Abstract
Mechanical-operation slot-ring modulators with more than 10 dB extinction ratio at 0.4 V are proposed. Slot width <; 50 nm is found to be necessary for mechanical operation rather than carrier-plasma effect.
Keywords
micro-optomechanical devices; micromechanical resonators; optical modulation; optical resonators; MEMS optical device; carrier-plasma effect; extinction ratio; low-voltage operation; mechanical-operation slot-ring modulators; slot width; slot-ring resonator; voltage 0.4 V; Electrostatics; Extinction ratio; Modulation; Optical resonators; Optical waveguides; Refractive index;
fLanguage
English
Publisher
ieee
Conference_Titel
Group IV Photonics (GFP), 2014 IEEE 11th International Conference on
Conference_Location
Paris
Print_ISBN
978-1-4799-2282-6
Type
conf
DOI
10.1109/Group4.2014.6962024
Filename
6962024
Link To Document