DocumentCode
1602094
Title
A calibration algorithm for nearfield scanning microwave microscopes
Author
Hoffmann, Johannes ; Wollensack, Michael ; Zeier, Markus ; Niegemann, Jens ; Huber, Hans-Peter ; Kienberger, Ferry
Author_Institution
RF & Microwave Lab. of the Nat. Metrol. Inst. of Switzerland (METAS), Bern-Wabern, Switzerland
fYear
2012
Firstpage
1
Lastpage
4
Abstract
This paper presents a new algorithm for the calibration of nearfield scanning microwave microscopes. By adopting techniques known from vector network analyzer calibration, a nearfield scanning microwave microscope can be calibrated at a specific microwave frequency with three standards. The advantages compared to existing calibration methods are that the calibration is valid for all possible samples and that the measurements require less time than other algorithms.
Keywords
calibration; near-field scanning optical microscopy; adopting techniques; calibration algorithm; microwave frequency; nearfield scanning microwave microscopes; vector network analyzer calibration; Atomic measurements; Power capacitors;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on
Conference_Location
Birmingham
ISSN
1944-9399
Print_ISBN
978-1-4673-2198-3
Type
conf
DOI
10.1109/NANO.2012.6322116
Filename
6322116
Link To Document