DocumentCode
1603738
Title
Pulsed laser deposition of carbon films
Author
Thareja, R.K. ; Neogi, A. ; Mishra, A.
Author_Institution
Dept. of Phys., Indian Inst. of Technol., Kanpur, India
fYear
1998
Firstpage
137
Abstract
Summary form only given. In the present paper, we report a comprehensive study of the emission characteristics of the laser produced plasma used for carbon film deposition in the presence of ambient atmosphere at both low and high irradiances. The use of fast photography using ICCD in analysing the plasma plume is also discussed. The observed results on shock wave formation and the instability at the leading edge of the plume and various parameters like temperature, density, velocity etc, of the plasma will also be presented. The characterisation can yield important information on the pulsed laser deposition processes and to a better understanding of the deposited films.
Keywords
carbon; plasma deposition; plasma production by laser; pulsed laser deposition; thin films; C; C films; ICCD; ambient atmosphere; density; deposited films; emission characteristics; fast photography; high irradiance; instability; laser produced plasma; low irradiance; plasma plume; pulsed laser deposition; shock wave formation; temperature; velocity; Atmosphere; Carbon dioxide; Optical pulses; Photography; Plasma density; Plasma properties; Plasma temperature; Plasma waves; Pulsed laser deposition; Shock waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1998. 25th Anniversary. IEEE Conference Record - Abstracts. 1998 IEEE International on
Conference_Location
Raleigh, NC, USA
ISSN
0730-9244
Print_ISBN
0-7803-4792-7
Type
conf
DOI
10.1109/PLASMA.1998.677534
Filename
677534
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