• DocumentCode
    1603738
  • Title

    Pulsed laser deposition of carbon films

  • Author

    Thareja, R.K. ; Neogi, A. ; Mishra, A.

  • Author_Institution
    Dept. of Phys., Indian Inst. of Technol., Kanpur, India
  • fYear
    1998
  • Firstpage
    137
  • Abstract
    Summary form only given. In the present paper, we report a comprehensive study of the emission characteristics of the laser produced plasma used for carbon film deposition in the presence of ambient atmosphere at both low and high irradiances. The use of fast photography using ICCD in analysing the plasma plume is also discussed. The observed results on shock wave formation and the instability at the leading edge of the plume and various parameters like temperature, density, velocity etc, of the plasma will also be presented. The characterisation can yield important information on the pulsed laser deposition processes and to a better understanding of the deposited films.
  • Keywords
    carbon; plasma deposition; plasma production by laser; pulsed laser deposition; thin films; C; C films; ICCD; ambient atmosphere; density; deposited films; emission characteristics; fast photography; high irradiance; instability; laser produced plasma; low irradiance; plasma plume; pulsed laser deposition; shock wave formation; temperature; velocity; Atmosphere; Carbon dioxide; Optical pulses; Photography; Plasma density; Plasma properties; Plasma temperature; Plasma waves; Pulsed laser deposition; Shock waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1998. 25th Anniversary. IEEE Conference Record - Abstracts. 1998 IEEE International on
  • Conference_Location
    Raleigh, NC, USA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-4792-7
  • Type

    conf

  • DOI
    10.1109/PLASMA.1998.677534
  • Filename
    677534