DocumentCode
1607300
Title
MEMS-Like Phase Shifter with Piezoelectric Control
Author
Poplavko, Y.M. ; Golubeva, I.P. ; Prokopenko, Y.V.
Author_Institution
Nat. Tech. Univ. of Ukraine, Kiev
fYear
2006
Firstpage
317
Lastpage
319
Abstract
This paper presents an attempt to realize control over effective parameters of transmission line utilising design suitable for MEMS applications. Proposed combined structure usually consists of two dielectric parts (or dielectric and electrode) with an air gap between them. By means of fast piezoelectric mini-actuator, the size of the air gap is changed. At present time phase shifters, based on varactor and PIN diodes constitute main options in MMICs.
Keywords
microactuators; phase shifters; piezoelectric actuators; varactors; MEMS application; MMIC; dielectric part; micromechanical device; phase shifter; piezoelectric control; transmission line; varactor; Conductivity; Control systems; Dielectrics; Electrodes; Frequency; MMICs; Micromechanical devices; Microstrip; Permittivity; Phase shifters;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwaves, Radar & Wireless Communications, 2006. MIKON 2006. International Conference on
Conference_Location
Krakow
Print_ISBN
978-83-906662-7-3
Type
conf
DOI
10.1109/MIKON.2006.4345179
Filename
4345179
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