DocumentCode
1607393
Title
Micro-machining of glass by excimer laser ablation
Author
von Alvensleben, F. ; Graumann, C. ; Wais, J.W.
Author_Institution
Laser Zentrum Hannover e.V.
fYear
1998
Firstpage
310
Lastpage
310
Abstract
Summary form only given, as follows. Micro-structuring of glass has been examined using UV radiation. The etch depth profile has been investigated. The limitations and possibilities for micro-structuring on glass has been found for the wavelengths of 193nm, 248nm and 308nm.
Keywords
Glass; Laser ablation;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe, 1998. 1998 CLEO/Europe. Conference on
Conference_Location
Glasgow, Scotland
Print_ISBN
0-7803-4233X
Type
conf
DOI
10.1109/CLEOE.1998.719464
Filename
719464
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