Integration of Heterogeneous MEMS and RF Systems as an Enabling Technology for Unobtrusive Ambient Intelligence

Within last few decades the electronic industry has grew up to the vast, most complex area. The most developed technologies are those related to photolithographic microfabrication on planar substrates. Essentially they were based on experiences originated from manufacturing of integrated circuits. Integration of different 3-D elements with electronic microcircuitry was a key goal of many technological programs including those defined as MEMS-RF. Intelligent integration led to discovery of a vast area of entirely new applications. It is clearly seen on an example of Ambient Intelligence that allows information society services to be available to anyone anywhere.