DocumentCode

1611070

Title

High Efficient Excimer ArF and KrF Lasers with Buffer Gas He

Author

Bagaev, S.N. ; Razhev, A.M. ; Zhupikov, A.A.

Author_Institution

Institute of Laser Physics

fYear

1998

Firstpage

357

Lastpage

357

Keywords

Gas lasers; Helium;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Europe, 1998. 1998 CLEO/Europe. Conference on

Conference_Location

Glasgow, Scotland

Print_ISBN

0-7803-4233X

Type

conf

DOI

10.1109/CLEOE.1998.719554

Filename

719554