DocumentCode
1614537
Title
EtherCAT enabled advanced control architecture
Author
Rostan, Martin ; Stubbs, Joseph E. ; Dzilno, Dmitry
Author_Institution
EtherCAT Technol. Group, Nuremberg, Germany
fYear
2010
Firstpage
39
Lastpage
44
Abstract
EtherCAT is becoming quickly adopted globally by the semiconductor, solar and FPD manufacturing industries. This Industrial Ethernet technology is an acknowledged SEMI standard that provides extraordinary real-time performance and topology flexibility, while meeting or even undercutting traditional fieldbus cost levels. EtherCAT enables advanced control architectures: instead of closing the high performance control loops locally in the peripheral devices, EtherCAT gives one the option to control even high speed processes over the bus and thus overcome limitations of the legacy approaches. EtherCAT enabled controls have simplified interfaces and limit supplier dependencies while giving access to previously closed embedded control algorithms.
Keywords
closed loop systems; control engineering computing; embedded systems; local area networks; optoelectronic devices; process control; production engineering computing; semiconductor industry; EtherCAT enabled advanced control architecture; FPD manufacturing industry; SEMI standard; closed embedded control algorithm; industrial ethernet technology; semiconductor industry; Clocks; Computer architecture; Ethernet networks; Process control; Protocols; Servomotors; Synchronization;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference (ASMC), 2010 IEEE/SEMI
Conference_Location
San Francisco, CA
ISSN
1078-8743
Print_ISBN
978-1-4244-6517-0
Type
conf
DOI
10.1109/ASMC.2010.5551414
Filename
5551414
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