DocumentCode
1616648
Title
2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595)
Volume
2
fYear
2002
Abstract
The following topics are dealt with: power devices and ICs; microsystem technologies; passive devices; optoelectronic and microwave devices; semiconductor physics and characterisation.
Keywords
capacitors; inductors; integrated circuit technology; micromachining; micromechanical devices; microwave devices; optoelectronic devices; power integrated circuits; power semiconductor devices; power supply circuits; resistors; microsystem technologies; microwave devices; optoelectronic devices; passive devices; power IC; power devices; semiconductor characterisation; semiconductor physics; Capacitors; Inductors; Integrated circuit fabrication; Microelectromechanical devices; Micromachining; Microwave devices; Optoelectronic devices; Power integrated circuits; Power semiconductor devices; Power supplies; Resistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics, 2002. MIEL 2002. 23rd International Conference on
Conference_Location
Nis, Yugoslavia
Print_ISBN
0-7803-7235-2
Type
conf
DOI
10.1109/MIEL.2002.1003289
Filename
1003289
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