Flexible nanomembranes: From sensors to motors

The deterministic release and rearrangement of thin solid films or inorganic nanomembranes on substrate surfaces offers exciting possibilities toward advanced integration strategies on a single chip, such as rolled-up nanotechnology, micro- and nano-origami, stretchable electronics, and thin membrane transfer. When a pre-stressed layer is released from substrate, it will be deformed as certain shapes by rolling or wrinkling because of its flexibility and built-in strain. Here, the details of such technology will be described as well as conceptual demonstrations for potential applications in e.g. tubular optical microcavity, microspring-based liquid flow rate sensor and tubular catalytic micromotors.