Characterization of the Dose Effect in Secondary Electron Emission

Summary form given only. Secondary electron emission (SEE) results from bombarding materials with electrons, atoms, or ions. When studying SEE, one is usually interested in determining the secondary electron yield, defined as the number of secondary electrons produced per incident primary electron. The amount of secondary emission is well known to depend on factors such as bulk and surface properties of materials, energy of incident particles, and their angle of incidence. However, results presented here indicate large variation of yield with incident electron dose/current density in addition to the above factors. There has been little effort in literature to quantify this effect. Experiments in this thesis aim to fill this gap.