Optimization of position of piezoresistive elements on substrate using FEM simulations

This paper presents an example of optimization of piezoresistive element placement on substrates for different types of deformation transducers (single side fixed cantilever beam and membrane). Modelling of structures was performed by simulator utilizing finite element method (FEM). Modelling and simulation of stress and strain distribution and deformations is practically essential for any design of MEMS structures. The modern simulation tools make the design easier and enable optimization of many different parameters before fabrication of new structure. Designed piezoresistive structures were consequently fabricated and tested.