3D silicon micromachined RF resonators

Passive components with high quality factor are required for many applications, e.g., filters. In the field of micromachining, this is commonly achieved by using multiple-wafer structures. An alternative technique is presented here together with design and measurement data, which is based on MEMS technology and yields single-wafer resonators thus reducing costs. Cavity resonators with the Si being partly removed show quality factors Q beyond 360.