• DocumentCode
    1628172
  • Title

    A scalable model for silicon spiral inductors

  • Author

    Scuderi, A. ; Biondi, T. ; Ragonese, E. ; Palmisano, G.

  • Author_Institution
    Facolta di Ingegneria, Catania Univ., Italy
  • Volume
    3
  • fYear
    2003
  • Firstpage
    2117
  • Abstract
    A simple model for monolithic spiral inductors on silicon substrates is presented. Each lumped element of the model is related to the layout geometry by analytical equations. Moreover, a novel equation for series resistance is also proposed. The model was validated by comparisons with on-wafer measurements over a wide range of geometrical layout parameters.
  • Keywords
    Q-factor; electronic engineering computing; inductors; lumped parameter networks; Q factor; Si; integrated inductors; layout geometry related lumped element models; monolithic spiral inductors; scalable silicon substrate spiral inductor models; series resistance equations; Electrical resistance measurement; Equations; Frequency estimation; Geometry; Immune system; Inductors; Q factor; Silicon; Solid modeling; Spirals;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Symposium Digest, 2003 IEEE MTT-S International
  • Conference_Location
    Philadelphia, PA, USA
  • ISSN
    0149-645X
  • Print_ISBN
    0-7803-7695-1
  • Type

    conf

  • DOI
    10.1109/MWSYM.2003.1210580
  • Filename
    1210580