• DocumentCode
    163108
  • Title

    Processor yield at 14nm and beyond

  • Author

    Yeric, Greg

  • Author_Institution
    R&D, ARM Austin, Austin, TX, USA
  • fYear
    2014
  • fDate
    24-27 March 2014
  • Firstpage
    111
  • Lastpage
    116
  • Abstract
    This paper discusses process integration and yield issues in advanced technology nodes and examines the related concerns and opportunities in the test structure field.
  • Keywords
    integrated circuit testing; microprocessor chips; advanced technology nodes; process integration; processor yield; size 14 nm; test structure field; Delays; FinFETs; Layout; Logic gates; Market research; Metals;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronic Test Structures (ICMTS), 2014 International Conference on
  • Conference_Location
    Udine
  • ISSN
    1071-9032
  • Print_ISBN
    978-1-4799-2193-5
  • Type

    conf

  • DOI
    10.1109/ICMTS.2014.6841477
  • Filename
    6841477
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=163108