Liquid sensor probe using complete reflection at free edge of shear horizontal mode surface acoustic wave

Author

Nomura, Tooru ; Saitoh, Atsushi ; Miyazaki, Tooru

Author_Institution

Shibaura Inst. of Technol., Tokyo, Japan

fYear

2001

fDate

6/23/1905 12:00:00 AM

Firstpage

482

Lastpage

488

Abstract

An edge-reflecting liquid SAW sensor probe based on the SH-SAW device and a tentative implementation system for the sensor probe has been proposed. Experiments using the 36°YX LiTaO₃ substrate have shown that the SH-SAW wave, which is reflected at the perpendicular edge, attenuates in the liquid in proportion to the propagation length. Moreover, it has shown that the amplitude of the reflected wave at the interface between the liquid and the edge is proportional to the square root of the product of the viscosity and density of the liquid. It has also been shown that the grating wave-guide eliminates SSBW, thereby facilitating the measurement of the electrical characteristics. Finally, a tentative system configuration suitable for the reflecting SH-SAW sensor was proposed

Keywords

chemical sensors; lithium compounds; surface acoustic wave sensors; ultrasonic reflection; LiTaO₃; SH-SAW device; chemical sensors; edge-reflecting liquid SAW sensor; free edge; grating waveguide; implementation system; liquid sensor probe; perpendicular edge reflection; shear horizontal mode SAW; shorted surface; Acoustic reflection; Acoustic sensors; Acoustic waves; Chemical sensors; Phase measurement; Probes; Sensor phenomena and characterization; Surface acoustic wave devices; Surface acoustic waves; Surface waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium and PDA Exhibition, 2001. Proceedings of the 2001 IEEE International

Conference_Location

Seattle, WA

ISSN

1075-6787

Print_ISBN

0-7803-7028-7

Type

conf

DOI

10.1109/FREQ.2001.956279

Filename

956279