Pulsed microwave source utilizing an all solid state driver for the generation of time-modulated ECR plasmas

Author

Myers, M.C. ; Hinshelwood, D.D. ; Meger, R.A. ; Pechacek, R.E.

Author_Institution

Div. of Plasma Phys., Naval Res. Lab., Washington, DC, USA

Volume

2

fYear

1999

Firstpage

803

Abstract

An inexpensive pulsed microwave source has been developed for time-modulated electron cyclotron resonance (TMECR) plasma studies. Utilizing series IGBT switching, a high voltage modulator drives a standard 2M130 magnetron producing microwaves at 2.45 GHz. The microwave power waveform follows the TTL modulator trigger 2-500 /spl mu/s in width, at rep-rates up to 10 kHz and duty factors to 50%. Preliminary measurements of the TMECR plasma potential as a function of microwave pulsewidth, rep-rate, and duty factor are presented.

Keywords

insulated gate bipolar transistors; magnetrons; microwave generation; modulators; plasma diagnostics; plasma radiofrequency heating; pulse generators; pulsed power supplies; switching circuits; voltage measurement; 10 kHz; 2 to 500 mus; 2.45 GHz; 2M130 magnetron; TTL modulator trigger; all solid state driver; duty factor; high voltage modulator; microwave power waveform; microwave pulsewidth; plasma potential measurement; pulsed microwave source; rep-rate; series IGBT switching; time-modulated ECR plasmas generation; time-modulated electron cyclotron resonance plasmas; Cyclotrons; Electrons; Insulated gate bipolar transistors; Magnetic switching; Plasma measurements; Plasma sources; Plasma waves; Pulse measurements; Resonance; Solid state circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

Pulsed Power Conference, 1999. Digest of Technical Papers. 12th IEEE International

Conference_Location

Monterey, CA, USA

Print_ISBN

0-7803-5498-2

Type

conf

DOI

10.1109/PPC.1999.823636

Filename

823636